Xunlight Corporation and its academic partner, the University of Toledo, have been leaders in tf-Si photovoltaic technologies. UT has granted XUNLIGHT CORPORATION a worldwide, exclusive license for all of thin film silicon based photovoltaic and related technologies developed by Dr. Deng and Dr. Deng's group at the University. Xunlight Corporation/UT currently operates a 100KW pilot production line. The Xunlight Corporation/UT tf-Si PV technologies were developed over the past decade using various resources, including major grants from US Department of Energy and NREL, Air Force Research Laboratory, National Science Foundation, and Ohio Department of Development. The photos below show the plasma-enhanced chemical vapor deposition systems for the deposition of thin-film silicon based semiconductor layers and the magnetron sputter deposition system for all of the non-semiconductor layers, Al, Ag, ZnO and ITO, required for the solar cells.

Ongoing grant funded projects currently at Xunlight Corporation (total funding: $3.6 million)

• $2,921,501, from US Department of Energy (DOE), to develop photovoltaic hydrogen generation (SHG) systems (Principal Investigator: Dr. Liwei Xu) (See photo below)
• $325,000, from EMTEC/DOE, to develop and improve manufacturing process for photovoltaic hydrogen generation systems (PI: Dr. Xu)
• $283,000, from NREL/UT, to develop photovoltaic testing system (PI: Dr. Aarohi Vijh)
• $99,450+$746,325, from DOE SBIR program, to develop lightweight/flexible solar cells (PI: Dr. Aarohi Vijh)
• $1,990,502, from the NIST ATP program, to develop a novel deposition process for the deposition of high-quality thin-film silicon (PI: Dr. Deng)

Ongoing grant funded projects in Dr. Deng's lab at UT, in direct support of Xunlight Corporation technology development activities (total funding: $6.2 million)

• $1,183,000, from National Renewable Energy Lab (NREL), to develop high-efficiency a-Si based solar cells ($283K to Xunlight Corporation). (PI: Dr. Deng)
• $2,000,000 plus $99,920, from Ohio Department of Development, to build a large-area solar cell fabrication machine (PI: Dr. A. Compaan and Dr. Deng). (See photo with then Governor Bob Taft below)
• $1,647,000, from Air Force Research Lab (Kirtland AFB), to develop flexible and lightweight solar cells (PI: Dr. A. Compaan and Dr. Deng)
• $992,000, from DOE, to develop solar hydrogen generation systems (PI: Dr. Deng)
• $283,000 from US Army, to develop solar panels and hydrogen generation systems (Co-PI: Dr. Deng)